Micromechanical testing of SU-8 cantilevers
نویسندگان
چکیده
منابع مشابه
SU-8 Cantilevers for Bio/chemical Sensing; Fabrication, Characterisation and Development of Novel Read-out Methods
Here, we present the activities within our research group over the last five yearswith cantilevers fabricated in the polymer SU-8. We believe that SU-8 is an interestingpolymer for fabrication of cantilevers for bio/chemical sensing due to its simple processingand low Young's modulus. We show examples of different integrated read-out methodsand their characterisation. We also show that SU-8 can...
متن کاملMicrostructuring of Su-8
Some studies on the fabrication of micro-needles, micro-pillers, and micro-channels using SU-8 negative photoresist for MEMS and bio-applications are reported. The SU-8 processing technology was standardized for the purpose. Micro-pillars were fabricated on SU-8 polymer by soft lithographic technique. Micro-needles were realized on SU-8 film utilizing lensing effect of the etched groove structu...
متن کاملStraight SU-8 pins
SU-8 can be patterned with high resolution, is flexible and tough. These characteristics qualify SU-8 as a material for making spotting pins for printing DNA and protein microarrays, and it can potentially replace the commonly used silicon and steel pins that are expensive, brittle in the case of silicon and can damage the substrate during the printing process. SU-8, however, accumulates large ...
متن کاملFabrication of multi-layer SU-8 microstructures
The fabrication of multi-level SU-8 microstructures using multiple coating and exposure steps and a single developing step has been achieved for up to six layers of SU-8. Alternating layers of SU-8 2010 (thin) and SU-8 2100 (thick) photoresist films were spin coated, followed by soft-bake, ultraviolet (UV) exposure and post-exposure bake steps. The multiple SU-8 layers were simultaneously devel...
متن کامل8 SU - 8 Photolithography and Its Impact on Microfluidics
Microfluidics is the science and technology of systems that process or manipulate small amounts (microto picoliters) of fluids, using channels with dimensions of tens to hundreds of micrometers (Whitesides, 2006). Microfluidics offers several advantages in a variety of fields including fuel cells (Dyer, 2002; Jankowski et al., 2002; Erdler et al., 2006; Nguyen et al., 2006; Morse, 2007; Kuriyam...
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ژورنال
عنوان ژورنال: Fatigue <html_ent glyph="@amp;" ascii="&"/> Fracture of Engineering Materials and Structures
سال: 2005
ISSN: 8756-758X,1460-2695
DOI: 10.1111/j.1460-2695.2005.00873.x